Si-SiC Metal Matrix Composite Ceramics
Ferrotec's metal matrix composites feature take advantage of various material mixes to deliver unique material properties and performance characteristics. The material properties of Silicon - Silicon Carbide metal matrix composites make it a good solution for parts that are free from surface defects. Si-SiC metal matrix materials are widely used for semiconductor and LCD manufacturing and inspection equipment.
Benefits
- Light Weight
- High Stiffness
- Low Thermal Expansion
- High Thermal Conductivity
- Excellent Mechanical Damping
- Facture Toughness
- Near Net Shape Process Allowance
Applications
- Semiconductor Equipment Parts
- Semiconductor Inspection Parts
- Display Equipment Parts
- Precision Equipment Parts
- Heat Sinks
Si / SiC Material Properties
| Si30 / SiC70 | Si25 / SiC75 | ||
| Composition (vol%) | Si 30 SiC 70 |
Si 25 SiC 75 |
|
| Density (g/cm3) | 2.92 | 3.00 | |
| Young's Modulus (Gpa) | 320 | 340 | |
| Young's Modulus / Density (Gpa ⋅ cm3/g) | 110 | 113 | |
| Flexural Strength (MPa) | 450 | 230 | |
| Coefficient of Thermal Expansion (1/°C×10-6) | 2.8 | 2.9 | |
| Thermal Conductivity (W/m×K) | 145 | 205 | |